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methods -> LIMA
 

 

 

Like SIMS and Auger, the LIMA technique provides the ability to use a finely focussed probe - in this case a laser - for analysis: very useful for examination of small sample features.

LIMA is an analytical technique based on a time of flight (ToF) mass spectrometer. The combination of fine focus probe and sensitive, "universal" analyser make i t especially useful for contamination and particulate characterisation - a fact reflected in the range of projects we regularly encounter.

 

 

LIMA

Laser

Ionisation

Mass

Analysis

 

The heart of the LIMA instrument is a high performance reflectron ToF mass spectrometer which uses as its ionising primary beam a powerful Nd:YAG laser. One of the main benefits of LIMA is that it has a small analysis area which allows the study of small particles on or in sample surfaces. Data (mass spectra) are more quickly obtained and from a deeper depth (~1µm) than SIMS. The technique requires minimal sample preparation and provides inorganic (H to U) elemental, isotopic and simple organic species analysis in seconds, with positive and negative ion detection.

LSA's LIMA provides optical viewing of the sample during analysis using a colour video-microscope with low magnification general survey views for rapid determination of analysis region and high magnification for precise target location and analysis
The instrument provides micrometer lateral resolution combined with ppm sensitivity and its powerful laser ablation ioniser enables rapid depth profiling.

LIMA is a good technique for rapid micro-point analysis of any material and can be used to examine buried features. It is especially sensitive to low mass elements which makes LIMA a highly complementary technique to SEM / EDX.

More (a summary)about the Auger technique

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